ミズノジュン   Mizuno Jun   水野　純    所属   石巻専修大学  理工学部    職種   教授
発表年月日	2016/10
発表テーマ	"A Low Drive Voltage RF-MEMS Switch Actuated by Comb-Drive Electrodes", Y. Takahashi and J. Mizuno
会議名	The Thirteenth International Conference on Flow Dynamics
主催者	東北大学 流体科学研究所
学会区分	国際学会
開催地名	仙台市
概要	概要 In this paper, we have performed the study of RF-MEMS switch driven by low voltage. RF switches fabricated by MEMS technology are relatively compact. However, these devices face problem of high drive voltages. Although researches for decreasing the drive voltage have been reported, these device structures and the fabrication processes are complex and poorly-reproducible. In order to solve these problems, we have proposed a novel RF-MEMS switch that is actuated by comb-drive electrodes with use of pull-in phenomenon. 開始ページ726 終了ページ727