ミズノジュン   Mizuno Jun   水野　純    所属   石巻専修大学  理工学部    職種   教授
発表年月日	2014/03
発表テーマ	"A Fundamental Study of Sub-Millimeter Electro-Mechanical Systems (SMEMS) Structures Based on a 3D-Printer", J. Mizuno and S. Takahashi
会議名	International Symposium on Fundamental and Applied Sciences 2014
主催者	Higher Education Forum
学会区分	国際学会
開催地名	日本・東京
概要	概要 In this paper, a fundamental study of structures fabricated by a 3D-printer is described. We have succeeded in fabricating beam structure with dimensions of 250μm and 200μm for the width and thickness, respectively. Interdigitated comb structure has also been fabricated. This structure acts as an electrostatic actuator by means of suitably masking and subsequently metalizing the structure itself. 3D-printer is widely used for creating mock-ups, on the other hand, we have used it for fabricating functional devices which is the original point of this study. In addition, the structure design is based on MEMS (Micro Electromechanical Systems) design concept. Furthermore, since the smallest dimension is the order of sub-millimeters, the authors named these novel devices as SMEMS (Sub-Milli Electromechanical Systems). Unlike MEMS fabrication technology, SMEMS is an environment-clean technology because it does not use any hazardous chemicals or gases. 開始ページ1460 終了ページ1462