エハラ　タカシ   Takashi Ehara   惠原　貴志    所属   石巻専修大学  人間学部    職種   教授
言語種別	英語
発行・発表の年月	2009/09
形態種別	研究論文（学術雑誌）
査読	査読あり
標題	The effect of thermal treatment conditions employed in sol–gel method on the structure of ZnO thin films
執筆形態	共著
掲載誌名	Weiley, Physica Stadi Solidi (a)
巻・号・頁	206(9),pp.2139–2142
総ページ数	4
概要	We have prepared ZnO thin films by the sol–gel method from a 2-methoxyethanol solution of zinc acetate dihydrate stabilized by 2-aminoethanol on SiO2 substrates. The structure of the films showed a significant dependency on thermal treatment temperature, not only in the final thermal-annealing process at several hundreds of degrees, but also in the heat-treatment after spin coating at lower temperature, which is performed to evaporate the organic solvent in the films. The intensity of the (0002) peak in X-ray diffraction showed significant dependence on the heat treatment conditions after spin coating, which ranged from 100 to 300 °C. The temperature employed in the initial 10 min of the heat treatment was found to be important in determining the structure of the film. The results indicate that the elimination condition of the organic components is important for achieving high crystallinity
DOI	10.1002/pssa.200881787