エハラ　タカシ   Takashi Ehara   惠原　貴志    所属   石巻専修大学  人間学部    職種   教授
言語種別	英語
発行・発表の年月	2010/07
形態種別	研究論文（学術雑誌）
査読	査読あり
標題	Preparation of ZnO Thin Film by the Sol–gel Method Using Low Temperature Ozone Oxidation
執筆形態	共著
掲載誌名	Weiley, Physica Studi Solidi (a)
巻・号・頁	207(7),pp.1600–1603
総ページ数	4
概要	Zinc oxide thin films have been prepared by the sol–gel method from a 2-methoxyethanol solution of zinc acetate dihydrate on SiO2 substrates using air, pure oxygen, and 1% ozone in oxygen as oxygen source. In the cases where air or oxygen was used as the oxygen source for thermal annealing, samples annealed at 600 to 800 °C exhibit a (0002) peak in X-ray diffraction (XRD). A sample annealed at 700 °C exhibited the highest (0002) peak intensity in conventional thermal annealing. However, the case using 1% ozone in oxygen as the atmosphere presented different results. A sample treated in 1% ozone at 100 °C had peak intensity in XRD (0002) comparable with samples annealed at several hundreds of degree in air or oxygen. This result indicates that the high oxidation efficiency of ozone is useful in decreasing the processing temperature of the sol–gel method.
DOI	10.1002/pssa.200983720