ミズノジュン   Mizuno Jun   水野　純    所属   石巻専修大学  理工学部    職種   教授
言語種別	英語
発行・発表の年月	2023/08
形態種別	研究論文
査読	査読あり
標題	A Novel MEMS Actuator Driven with a Low DC Voltage
執筆形態	単著
掲載誌名	Sensors and Materials
掲載区分	国外
出版社・発行元	MYU Tokyo
巻・号・頁	35(8),pp.2909-2932
総ページ数	24
概要	In this paper, we propose a novel MEMS actuator that can achieve a relatively large in-plane displacement of 5 μm or more driven with a low dc voltage of 3.3 to 5.0 V to ensure compatibility with integrated circuits and microcontroller unit (MCU) boards. The drive mechanism is based on a comb-shaped electrostatic microactuator. It would be strongly desirable to control these devices directly using integrated circuits and MCU boards without any external driver boosters or power supplies. In this paper, we demonstrate that a 6 μm in-plane displacement can be achieved with a dc driving voltage of less than 8.0 V by using a pull-in phenomenon and multiple spring-mass systems based on a comb-shaped electrostatic MEMS actuator.
DOI	https://doi.org/10.18494/SAM4411